A Robust Controller Design for Piezoelectric Positioning Stage with Bouc-Wen Hysteresis Compensator

Abstract

<span>In this paper, an inverse compensator based on the Bouc-Wen model is used to reduce the effect of hysteresis on a piezoelectric micro-actuator. This compensator is used as an open loop controller which partially eliminates the system hysteresis effect. In the last step, in order to increase the reliability of the system and to achieve the desired goals, a H∞ robust controller is proposed in the presence of a compensator, to detect in the presence of modeling error and compensator error. At the end, simulation results are provided by MATLAB to demonstrate the effectiveness of the proposed control scheme. These results indicate that the proposed scheme provides a robust system performance and the tracking error reaches zero with acceptable accuracy.</span>