Numerical Study of Microbeam with Geometric Discontinuity Under Electrostatic Load using Strain Gradient Theory

Abstract

In this work, the pull in analysis of microbeam with geometric discontinuity for two different boundary conditions has been investigated. Boundary conditions are considered as Clamped-Free (CF) and Clamped-Clamped (CC). The governing equations are transformed into non-dimensional form and then solved using Differential Quadrature method (DQ). The conductive polymer length scale parameter was also obtained. The effects of different parameters and pull in voltage on microbeam are studied. Most of the microbeams analyzes were made of Gold, Nickel or Silicon, but we used variety of conductive polymers in this paper. The results show that conductive polymer microbeams can be a suitable substitute for expensive metals. The results can be used to design and improve the performance of Micro-Electromechanical System (MEMS) devices.