Study Of Thermoelastic Damping in an Electrostatically Deflected Circular Micro-Plate Using Hyperbolic Heat Conduction Model

Abstract

Thermoelastic damping (TED) in a circular micro-plate resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for different ambient temperatures. Effects of the geometrical parameters on TED and the critical thickness are investigated. Furthermore, the effect of applied bias DC voltage on TED for an electrostatically deflected micro-plate is also investigated.