A New Kind of Microstructure Pattern Transferring onto Glass Substrate Using the Plasma Treatment

Abstract

In this work, a two-dimensional square periodic array was successfully transferred onto a rigid glass substrate during an innovative and simple-design two-step process of pattern transferring using Kapton tape and plasma technology. Flexible and stretchable, Kapton tape was selected for pattern transferring onto the glass for the first time herein; in parallel, the vacuum plasma treatment was utilized to improve surface adhesion properties and aid the pattern transferring process. The proposed 2D square plasmonic array supported the plasmon-induced transparency (PIT) phenomenon, which is caused by the excitation of surface plasmon resonances. The current study simulated the fabricated plasmonic structure using the finite-difference time-domain (FDTD) method and investigated the propagation of surface plasmon polariton (SPP) and cavity modes which enhanced transmission. This fabrication technique can offer new insights for micro/nanofabrication technology.