The Growth of Diamond-like Carbon Nano-Structures: Investigation of the Affecting Factors

Abstract

Using DC-Plasma Enhanced Chemical Vapour Deposition (PECVD) system, the impact of pure Co on<br />the growth of diamond-like carbon (DLC) nano-structures were investigated. In this study, Acetylene<br />(C2H2) was diluted in H2 and used as the reaction gas and Cobalt (Co) nano-particles were used as<br />the catalyst. The effect of preparing Co catalyst at temperatures of 240°C and 350°C and growth<br />conditions was studied. The results showed that the Co catalyst sputtering at 350°C temperature has<br />a significant impact on purity, morphology, and synthesized diamond-like carbon nano-structures.<br />This research was conducted to investigate the effect of catalyst preparation and growth conditions.<br />Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy were used to<br />characterize the diamond-like carbon nano-structures produced under different conditions.